3D Profile measurement system
The SmartPROFILER X-300 has the latest generation of 3D technology implemented. Making use of White-Light-Interferometers from Heliotis 3D-pixel sensor. The system enables true sub-micrometer heigth resolution.
Advantages:
Measurement capability extended- Height measurements with true submicrometer accuracy
- Unprecedented measurement speed
- Higher resolution in x, y at given FOV
- Highest intra-scene dynamic range
- Large set of optical magnifications
- Capable of Measuring:
Planarity
Geometry
Defects - Range of Magnifications enalbling:
Field of View Variety
Variable Optical Resolution from (µm)
Technical Data:
- Measuring Range:............ (L) 350 x (W) 200 x (H) 40mm
- Scale Resolution:............. 0.1µm
- Positional accuracy: ....... ± 2.5µm
- Accuracy E1:..................... ± (2.0 + L/500)
- Accuracy E2:..................... ± (3.0 + L/350)
- Machine dimension:........ (L) 1200 x (W) 900 x (H) 1200mm
- Weight:............................... approx. 280kg
Optional:
smartSCAN-OFFLINE Station
PC Station for Offline Programming and Evaluation.
Programming is easily offline possible - production need not to be interrupted
