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Phoenix Nano

Phoenix Nano 8pngNext Generation 
Ultra High Resolution Automatic Optical Inspection System

Phoenix Nano, CIMS latest generation of AOI system, is designed to support high volume manufacturing of IC Substrates. It is capable to scan down to 5 µm line/space width technology.

The system’s state of the art optical technology Prisma™ is designed to provide flexible light coverage with maximum contrast in order to support high resolution image acquisition at high scanning speed. Optimized performance is achieved by combining sharp high resolution image with customizable detection algorithms.

Equipped with the state-of-the-art image acquisition and advanced software capabilities, the Phoenix product family is renown for its exceptional detection achieved with lowest possible false calls rate.

Phoenix Nano is powered by Spark™ – an innovative cross-platform detection engine

 Basic functionalities include

  • Multi-Step and Multi-Zone for best detection policy set-up per zone
  • Micro Inspection and metrology engine
  • Fully automated set-up
  • Variable continuous resolution defined automatically
  • Cad Analyzer creates best reference for detection
  • Dynamic Job enabling operators to instantly change: • resolution, steps, parameters on the AOI
  • Filtering system – Inspection results can be re-processed on AOI / CVR and present defects immediately after filtering
  • Full automatic (BLACK BOX) Data Processing and Preparation from CAM Station

 System highlights

  • New linear motors for smooth & silent motion
  • Micro technology Automated vacuum table
  • Prisma illumination 64 bit based firmware
  • Powerful processors to handle high density PCB
  • Compatible with front or back L/U automation
  • Simple and quick setting for new jobs

Optional Features

  • +2DM - panel dimension stability
  • +2CD - critical dimension
  • +3DH - height & depth measurements
  • +3DP – 3D profiling
  • FI - final inspection
  • CRS / PX - offline reference station

microlight spark










For more information, visit the website or send us your information request.