Slide background
Slide background

Phoenix Nano

Next Generation 
Ultra High Resolution Automatic Optical Inspection System


Phoenix Nano, the next generation of ultra-high resolution AOI,  is capable to scan line width of down to 5 µm. This highly advanced system is designed for the high-end IC Substrates products and is the extension of the existing Phoenix Micro of 7 µm line scanning capabilities.

Phoenix Nano incorporates some of the most advanced optics as well Camtek’s latest generation Spark™ 2.0 software, running on the in-house designed electronic hardware platform collectively called Micro technology.

In addition to its ground breaking 5 µm line scanning capabilities, Phoenix Nano is designed to detect all types of critical defects, both 2D and 3D, on the most advanced IC substrates while keeping low false calls rate and maintaining fast throughput. It can also be equipped with additional 2D and 3D metrology capabilities.

 Basic functionalities include

  • Multi-Step and Multi-Zone for best detection policy set-up per zone
  • Micro Inspection and metrology engine
  • Fully automated set-up
  • Variable continuous resolution defined automatically
  • Cad Analyzer creates best reference for detection
  • Dynamic Job enabling operators to instantly change: • resolution, steps, parameters on the AOI
  • Filtering system – Inspection results can be re-processed on AOI / CVR and present defects immediately after filtering
  • Full automatic (BLACK BOX) Data Processing and Preparation from CAM Station

 System highlights

  • New linear motors for smooth & silent motion
  • Micro technology Automated vacuum table
  • Prisma illumination 64 bit based firmware
  • Powerful processors to handle high density PCB
  • Compatible with front or back L/U automation
  • Simple and quick setting for new jobs

Optional Features

  • +2DM - panel dimension stability
  • +2CD - critical dimension
  • +3DH - height & depth measurements
  • +3DP – 3D profiling
  • FI - final inspection
  • CRS / PX - offline reference station 

For more information, visit the website or send us your information request.