Printed Circuit Board (PCB) series is specifically configured to meet high-to-low production requirements. All system components, including the plasma process chamber, control electronics, RF power supply and PC controller are housed in a single compact enclosure to conserve valuable factory floor space.
Ultimate Process Uniformity Uniformity depends on precise and independent control of all process variables, including an even dispersion of process gas and repeatable gas ionization. March systems are designed to ensure systematic process control - within a panel, from panel to panel and batch to batch.