FP64 systems are specifically configured to meet flex panel production requirements. Daily operating expenses, such as the process gases and power consumption, are minimized through unique design concepts. The FP64 system is a cost and space efficient plasma system for inner layer processes and flexible panel formats.
The FP64 platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz power supply are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.
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FP64 Plasma Treatment System
